State of the art micro- and nanofabrication strongly depends on bulk wafer based photolithographic methods making manufacturing processes fast and efficient. However, the minimum feature size of these photolithographic processes is limited by the optical resolution of visible light which is in the range of 500nm.
Therefore, the present project intends the development of novel nano manufacturing methods by emerging beyond the paradigm of photo-optic methods.
|Figure 1: Controlled fabrication of gold nanowires|
|Figure 2: Bitmap image of the Parthenon temple consisting of individual sub-micron pillars|
Instead of using top-down manufacturing, which aims at the production of small structures by controlled removal of significant parts of bulk material (as done in photolithography), this project attempts the production of small structures by the assembly of even smaller objects, a process commonly called bottom-up approach. This will be achieved by on-demand printing of liquid-based nanoparticles to form 2D- and/or 3D structures.
In particular, electrostatic forces are used to manipulate nanoparticles in a carrier liquid. Multiple particle actuation methods ranging from traditional electrospraying of charged particles over the electroosmotic flow of ionic liquids and ultimately the dielectrophoretic actuation of non-charged, but polarizable objects are being investigated.
Concluding, the goal of this project is the development of novel non-contact deposition methods for ultra-small amounts of colloids while understanding the underlying physical and engineering principles.
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